Welcome to the UMBC MME Technical Service Center Micro-fabrication Lab web page! The micro-fabrication lab has been in use since 1992 originally supporting electrical engineering in the field of microelectronics. Through the years chemical/biochemical engineering, mechanical engineering, physics and outside groups have successfully built everything from semiconductor lasers, photonic devices, cantilevers, microfluidic devices and bio sensors to name a few. As of July 1 2013, the micro-fabrication facility is now being operated as a cost center under the College of Engineering IT supporting research efforts to the entire campus as well as non-profits and commercial clients. If you wish to use the facility, formal training is required. If you wish to have processing done for you that can be arranged as well. * Disclosure – The class 100 and class 1000 cleanroom environment is not operational.
Steps Required to Become an Independent User
- Attend micro-fabrication orientation – This is a 2 hour class that informs users about the lab, protocols, facilities and equipment. Orientation is scheduled as demand requires. To request admission, contact Tim Buckheit at firstname.lastname@example.org
- Pass a web based safety training test. For more details visit the web safety training page.
- Once your research is understood, specific equipment training will occur.
Contact & Location Information
- Assistant Director – Tim Buckheit.
- Internal phone – 5-3508.
- External phone – 410.455.3508.
- Email – email@example.com
- Office location – 5200 Westland Blvd., TRC building, room 204.
- Micro-fabrication lab location – 5200 Westland Blvd., TRC building, room 004.
Hours of Operation
- Staffed – M-F, 9:00 am- 4:30 pm.
- Qualified independent users – Monday – Sunday, 7:00 am – 10:00 pm.
Work Request Form
- The 271 square foot yellow room houses photolithography, optical inspection, step height measurement and annealing. Equipment to include:
- Solvent and base fume hoods.
- Headway photoresist spinner.
- Hard and soft bake convection ovens.
- Home built vacuum hold down hot plates.
- JBA contact aligner.
- Karl Suss MJB3 backside aligner.
- AZ210 printed circuit board exposure system.
- Olympus IR microscope with digital imaging.
- Bruker Dektak DXT-XT profilometer.
- Home built annealing system.
- The 378 square foot room houses metal deposition, reactive ion etching of photoresist and SIO2, thermal SIO2 deposition, ashing and wet etching. Equipment to include:
- Acid fume hood.
- Denton DV 502A – 3 post thermal metal evaporator.
- Technics micro series 85 reactive ion etcher.
- Home built thermal SIO2 deposition system.
- LFE barrel asher.
- UVOCS system.
- Denton Vacuum desktop sputter coater.
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