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Micro-fabrication Lab

Welcome to the UMBC MME Technical Service Center Micro-fabrication Lab web page!  The micro-fabrication lab has been in use since 1992 originally supporting electrical engineering in the field of microelectronics.  Through the years chemical/biochemical engineering, mechanical engineering, physics and outside groups have successfully built everything from semiconductor lasers, photonic devices, cantilevers, microfluidic devices and bio sensors to name a few. As of July 1 2013, the micro-fabrication facility is now being operated as a cost center under the College of Engineering IT supporting research efforts to the entire campus as well as non-profits and commercial clients.  If you wish to use the facility, formal training is required.  If you wish to have processing done for you that can be arranged as well.  * Disclosure – The class 100 and class 1000 cleanroom environment is not operational.

 

 

Steps Required to Become an Independent User

  • Attend micro-fabrication orientation – This is a 2 hour class that informs users about the lab, protocols, facilities and equipment.  Orientation is scheduled as demand requires.  To request admission, contact Tim Buckheit at  buckheit@umbc.edu
  • Pass a web based safety training test.  For more details visit the web safety training page.
  • Once your research is understood, specific equipment training will occur.

Fee Structure

Contact & Location Information

  • Assistant Director – Tim Buckheit.
  • Internal phone – 5-3508.
  • External phone – 410.455.3508.
  • Email – buckheit@umbc.edu
  • Office location – 5200 Westland Blvd., TRC building, room 204.
  • Micro-fabrication lab location – 5200 Westland Blvd., TRC building, room 004.

Hours of Operation

  • Staffed – M-F, 9:00 am- 4:30 pm.
  • Qualified independent users – Monday – Sunday, 7:00 am – 10:00 pm.

Work Request Form

Process Equipment

  • The 271 square foot yellow room houses photolithography, optical inspection, step height measurement and annealing. Equipment to include:
    • Solvent and base fume hoods.
    • Headway photoresist spinner.
    • Hard and soft bake convection ovens.
    • Home built vacuum hold down hot plates.
    • JBA contact aligner.
    • Karl Suss MJB3 backside aligner.
    • AZ210 printed circuit board exposure system.
    • Olympus IR microscope with digital imaging.
    • Bruker Dektak DXT-XT profilometer.
    • Home built annealing system.
  • The 378 square foot room houses metal deposition, reactive ion etching of photoresist and SIO2, thermal SIO2 deposition, ashing and wet etching. Equipment to include:
    • Acid fume hood.
    • Denton DV 502A – 3 post thermal metal evaporator.
    • Technics micro series 85 reactive ion etcher.
    • Home built thermal SIO2 deposition system.
    • LFE barrel asher.
    • UVOCS system.
    • Denton Vacuum desktop sputter coater.

A Picture is Worth a Thousand Words

 

Robing Room

Robing Room

 

Denton Thermal Metal Evaporator

Denton Thermal Metal Evaporator

Thermal Silicon Oxide Deposition

Thermal Silicon Oxide Deposition

Denton Desk II Sputter Coater

Denton Sputter Coater

Scale

Scale

Reactive Ion Etcher

Reactive Ion Etcher

LFE Barrel Asher

LFE Barrel Asher

Ultraviolet Ozone Cleaning System

Ultraviolet Ozone Cleaning System

Photolithography Room

Photolithography Room

Photolithography Room

Photolithography Room

Headway Spinner

Headway Spinner

Vacuum Hold Down Hot Plates

Vacuum Hold Down Hot Plates

Convection Ovens

Convection Ovens

JBA Contact Aligner

JBA Contact Aligner

Karl Suss Backside Contact Aligner

Karl Suss Backside Contact Aligner

PCB Top/Bottom Exposure System

PCB Top/Bottom Exposure System

Microscope With Digital Imaging System

Microscope With Digital Imaging System

Bruker Dektak XT Profilometer

Bruker Dektak XT Profilometer

Annealing System

Annealing System

Vacuum Oven

Vacuum Oven